Quantitative electrostatic force measurement and characterization based on oscillation amplitude using atomic force microscopy
نویسندگان
چکیده
منابع مشابه
Determination of electrostatic force and its characteristics based on phase difference by amplitude modulation atomic force microscopy
Electrostatic force measurement at the micro/nano scale is of great significance in science and engineering. In this paper, a reasonable way of applying voltage is put forward by taking an electrostatic chuck in a real integrated circuit manufacturing process as a sample, applying voltage in the probe and the sample electrode, respectively, and comparing the measurement effect of the probe osci...
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2020
ISSN: 2158-3226
DOI: 10.1063/1.5136332